The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
May. 07, 2009
Peter G. Steeneken, Valkenswaard, NL;
Hilco Suy, Hulst, NL;
Martijn Goossens, Veldhoven, NL;
NXP B.V., Eindhoven, NL;
Abstract
A MEMS device comprises first and second opposing electrodes (), wherein the second electrode () is electrically movable to vary the electrode spacing between facing first sides of the first and second electrodes. A first gas chamber () is provided between the electrodes, at a first pressure, and a second gas chamber () is provided on the second, opposite, side of the second electrode at a second pressure which is higher than the first pressure. This arrangement provides rapid switching and with damping of oscillations so that settling times are reduced.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile