The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
Jul. 26, 2010
Applicants:
Taichi Nishio, Osaka, JP;
Hiroshige Hirano, Nara, JP;
Yukitoshi Ota, Osaka, JP;
Inventors:
Assignee:
Panasonic Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/40 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device includes: a semiconductor substrate having a first surface as a surface on which an element is formed, and a second surface opposite to the first surface; a through hole formed so as to extend through the semiconductor substrate from the first surface to the second surface; an insulating film formed on an inner wall of the through hole; and a conductive portion formed in a space surrounded by the insulating film in the through hole. The insulating film continuously extends on the inner wall of the through hole and on the second surface.