The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
Jun. 20, 2011
Yao-hung Yang, Sunnyvale, CA (US);
Tuan Anh Nguyen, Sunnyvale, CA (US);
Sanjeev Baluja, Sunnyvale, CA (US);
Andrzej Kaszuba, San Jose, CA (US);
Juan Carlos Rocha, San Carlos, CA (US);
Thomas Nowak, Cupertino, CA (US);
Dustin W. Ho, Fremont, CA (US);
Yao-Hung Yang, Sunnyvale, CA (US);
Tuan Anh Nguyen, Sunnyvale, CA (US);
Sanjeev Baluja, Sunnyvale, CA (US);
Andrzej Kaszuba, San Jose, CA (US);
Juan Carlos Rocha, San Carlos, CA (US);
Thomas Nowak, Cupertino, CA (US);
Dustin W. Ho, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A reflector for an ultraviolet lamp can be used in a substrate processing apparatus. The reflector comprises a centrally positioned longitudinal strip and first and second side reflectors to form a parabolic-type surface. The longitudinal strip and first and second side reflectors have curved reflective surfaces with dichroic coatings and the longitudinal strip comprises a plurality of through holes to direct a coolant gas toward the ultraviolet lamp. A chamber that uses an ultraviolet lamp module with the reflector, and a method of ultraviolet treatment are also described.