The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
Feb. 25, 2009
Guenther Hans Derra, Aachen, DE;
Michael Schaaf, Herzogenrath, DE;
Guenther Hans Derra, Aachen, DE;
Michael Schaaf, Herzogenrath, DE;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
The present invention relates to a debris mitigation device for use with a radiation source () generating optical radiation, in particular extreme ultraviolet radiation (EUV) or soft x-rays, and emitting undesired substances and/or particles which can deposit on optical surfaces in a radiation path of said radiation source (), and to a corresponding drive assembly. The debris mitigation device comprises at least one rotating foil trap () and the drive assembly. The drive assembly comprises a driving motor () and a driving axis (), to which the rotating foil trap () is fixed. The driving motor () and bearings () supporting the driving axis () are enclosed in a casing () having an aperture for the driving axis () and at least one outlet opening () for a sealing gas. The outlet opening () is connectable to a pump for pumping out the sealing gas. The aperture is designed to define a gap () between the driving axis () and the casing (), wherein said gap () is connected to a supply pipe () for supplying the sealing gas through said gap () into said casing (). The proposed debris mitigation device allows the use of conventional driving motors and oiled or lubricated bearings without the risk of contamination of the vacuum chamber in which the debris mitigation device is used. This results in an enhanced service life of the driving assembly.