The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
Sep. 19, 2011
Applicants:
Ryuji Sugiura, Hamamatsu, JP;
Takeshi Sakamoto, Hamamatsu, JP;
Inventors:
Ryuji Sugiura, Hamamatsu, JP;
Takeshi Sakamoto, Hamamatsu, JP;
Assignee:
Hamamatsu Photonics K.K., Hamamatsu-shi, Shizuoka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An object to be processed can be cut highly accurately along a line to cut. An object to be processedis irradiated with laser light while locating a converging point within a silicon wafer, and the converging point is relatively moved along a line to cut, so as to form modified regions M, Mpositioned within the objectalong the line to cut, and then a modified region Mpositioned between the modified regions M, Mwithin the object