The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
Feb. 22, 2011
Michael Viehmann, Schechen/Pfaffenhofen, DE;
Werner Schütz, Rohrdorf, DE;
Alexander Waldauf, Söll, AT;
Michael Viehmann, Schechen/Pfaffenhofen, DE;
Werner Schütz, Rohrdorf, DE;
Alexander Waldauf, Söll, AT;
Rasco GmbH, Kolbermoor, DE;
Abstract
The invention provides a microelectromechanical system testing device, comprising an acoustic chamber having two opposing walls; a sound source for generating sound within the acoustic chamber at a first frequency in the range of 20 Hz to 10 kHz, the sound source being arranged at one of the opposing walls; and an interface for coupling one or more microelectromechanical systems thereto, the interface being arranged at the other of the two opposing walls and comprising a respective coupling site for each microelectromechanical system; wherein the acoustic chamber is adapted to have a total harmonic distortion (THD) at each coupling site of the interface for the first frequency below 1%, preferably below 0.8%, more preferably below 0.6%, most preferably below 0.4% when including all harmonics of the first frequency in the range of 20 Hz to 20 kHz, in particular for the first frequency being 1 kHz or 4 kHz.