The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8336489 B1

PDF
Full Text
Expired
Date of Patent:
Dec. 25, 2012

Filed:

Oct. 18, 2011
Applicants:

Volker Probst, Munich, DE;

Walter Stetter, Illertissen, DE;

Inventors:

Volker Probst, Munich, DE;

Walter Stetter, Illertissen, DE;

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C10J 1/00 (2006.01); B01J 38/04 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); C23C 16/06 (2006.01);
U.S. Cl.
CPC ...
Abstract

A thermal evaporation apparatus for depositing of a material on a substrate is described. The apparatus can comprise material storage means; heating means to generate a vapour of the material in the material storage means; vapour outlet means comprising a vapour receiving pipe having vapour outlet passages, and emission reducing means arranged such that an external surface of the vapour outlet means directed to said substrate exhibits low emission. Also the use of the apparatus, and a method of depositing a material onto a substrate by thermal evaporation are described.


Find Patent Forward Citations

Probst, Volker. (2012). Thermal evaporation apparatus, use and method of depositing a material (U.S. Patent No. 8336489). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8336489

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