The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2012
Filed:
Jan. 14, 2010
Kazuhiro Hayashi, Tokyo, JP;
Kazuhiro Hayashi, Tokyo, JP;
Olympus Corporation, Tokyo, JP;
Abstract
An illumination optical system includes, in order from a light source side a collector lens, a field stop, a field lens having positive power, an aperture stop, and a collective lens having positive power. The illumination optical system is a substantially both-side telecentric optical system between the field stop and a sample surface, and satisfies the following conditional expressions where Dindicates a diameter of the field stop, β indicates a magnification from the sample surface to the field stop, and NA indicates a numerical aperture on the sample surface side of the illumination optical system.15≧/β≧9  (1)0.85≧≧0.5  (2)