The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2012
Filed:
Nov. 10, 2009
Jochen Reinmuth, Reutlingen, DE;
Neil Davies, Sonnenbuehl-Genkingen, DE;
Simon Armbruster, Gomaringen, DE;
Ando Feyh, Tamm, DE;
Jochen Reinmuth, Reutlingen, DE;
Neil Davies, Sonnenbuehl-Genkingen, DE;
Simon Armbruster, Gomaringen, DE;
Ando Feyh, Tamm, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A sensor includes at least one micro-patterned diode pixel that has a diode implemented in, on, or under a diaphragm, and the diaphragm in turn being implemented above a cavity. The diode is contacted via supply leads that are implemented at least in part in, on, or under the diaphragm, and the diode is implemented in a polycrystalline semiconductor layer. The diode is implemented by way of two low-doped diode regions or at least one low-doped diode region. At least parts of the supply leads are implemented by way of highly doped supply lead regions of the shared polycrystalline semiconductor layer.