The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 18, 2012

Filed:

Dec. 11, 2009
Applicants:

Steven M. Zuniga, Soquel, CA (US);

Derek G. Aqui, Portland, OR (US);

Andrew J. Nagengast, Sunnyvale, CA (US);

Kirk G. Liebscher, San Jose, CA (US);

John M. Alexander, San Jose, CA (US);

Keenan Leon Guerrero, Boise, ID (US);

Inventors:

Steven M. Zuniga, Soquel, CA (US);

Derek G. Aqui, Portland, OR (US);

Andrew J. Nagengast, Sunnyvale, CA (US);

Kirk G. Liebscher, San Jose, CA (US);

John M. Alexander, San Jose, CA (US);

Keenan Leon Guerrero, Boise, ID (US);

Assignee:

Twin Creeks Technology, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 21/46 (2006.01);
U.S. Cl.
CPC ...
Abstract

A system for treating distinct batches of workpieces to serial procedures comprises first and second multi-site structures. In each multi-site structure the sites are rotatable for alignment in turn with loading and unloading stations together constituting treatment or process stations. Workpieces of a batch are loaded onto all of the treatment sites and then simultaneously and identically treated by operation of treatment stations with which the process sites are aligned. After treatment in the first structure, workpieces of a batch are transferred from the unloading stations of the first structure to the loading stations of the second structure for further processing.


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