The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2012
Filed:
Apr. 16, 2009
Applicants:
Fang Mei, Foster City, CA (US);
David Tanner, San Jose, CA (US);
Inventors:
Fang Mei, Foster City, CA (US);
David Tanner, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23G 1/02 (2006.01); B08B 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present disclosure relates to methods and related cleaning solutions () for cleaning a glass substrate (), such as for removing metal ion contaminates from a glass substrate () having a transparent conductive oxide layer (). One method includes: providing a glass substrate () having a transparent conductive oxide (TCO) layer (); and exposing the glass substrate () to a cleaning solution () that includes 0.5% to 5% organic acid, wherein the organic acid used includes citric acid, acetic acid, or oxalic acid.