The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2012
Filed:
May. 15, 2008
Dmitry Lubomirsky, Cupertino, CA (US);
Tien Fak Tan, Fremont, CA (US);
Lun Tsuei, Mountain View, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Tien Fak Tan, Fremont, CA (US);
Lun Tsuei, Mountain View, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A wafer pedestal of a semiconductor apparatus is provided. The wafer pedestal is capable of supporting a substrate. The wafer pedestal includes a pedestal having at least one purge opening configured to flow a purge gas and at least one chucking opening configured to chuck the substrate over the pedestal. The pedestal includes a sealing band disposed between the at least one purge opening and the at least one chucking opening. The sealing band is configured to support the substrate.