The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2012
Filed:
Jun. 19, 2009
Toshimasa Tsuda, Saitama, JP;
Toshimasa Tsuda, Saitama, JP;
Nihon Dempa Kogyo Co., Ltd., Tokyo, JP;
Abstract
A piezoelectric component manufacturing method is provided. The method includes preparing an integrated piezoelectric substrate, and forming comb-shaped electrodes and wiring electrodes having element wiring connecting to the comb-shape electrodes on a primary surface of the piezoelectric substrate, forming an SiOlayer, performing a characteristics inspection on the piezoelectric substrate and marking defective piezoelectric elements, coating said SiOlayer surface with photosensitive resin, and then exposing and developing to form an insulating layer. The method includes vapor-depositing a metal layer, and removing said metal layer adhered to resist by an organic solvent when removing the resist, to form a rewiring layer, coating said rewiring layer with photosensitive resin, affixing a photosensitive resin film to a top end surface of said photosensitive resin layer, forming electrode posts in the holes by electroplating, and dicing said piezoelectric substrate along scribe lines to obtain individual piezoelectric components.