The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2012
Filed:
Sep. 22, 2008
Applicants:
Harish Bhaskaran, Thalwil, CH;
Michel Despont, Au, CH;
Ute Drechsler, Rueschlikon, CH;
Abu Sebastian, Adliswil, CH;
Inventors:
Harish Bhaskaran, Thalwil, CH;
Michel Despont, Au, CH;
Ute Drechsler, Rueschlikon, CH;
Abu Sebastian, Adliswil, CH;
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01Q 60/40 (2010.01); G01Q 10/00 (2010.01);
U.S. Cl.
CPC ...
Abstract
Tips including a platinum silicide at an apex of a single crystal silicon tip are provided herein. Also, techniques for creating a tip are provided. The techniques include depositing an amount of platinum (Pt) on a single crystal silicon tip, annealing the platinum and single crystal silicon tip to form a platinum silicide, and selectively etching the platinum with respect to the formed platinum silicide.