The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2012
Filed:
May. 03, 2010
Kang Lee, Siheung-si, KR;
Sang Jeen Hong, Gyeonggi-do, KR;
Sang Youl Lee, Siheung-si, KR;
Jong Hwan Ahn, Seoul, KR;
Kang Lee, Siheung-si, KR;
Sang Jeen Hong, Gyeonggi-do, KR;
Sang Youl Lee, Siheung-si, KR;
Jong Hwan Ahn, Seoul, KR;
Hwaback Engineering Co., Ltd., Gyeonggi-Do, KR;
Abstract
The apparatus for detecting arc occurred in chamber for plasma treatment used for manufacturing semiconductor or LCD panel comprises, a sensor module for sensing the arc; a processor module for processing data from the sensor module; wherein the sensor module includes RGB color sensor for sensing color data of the arc occurred in the chamber, the RGB color sensor is a sensor sensable at least one of red color or green color or blue color of the arc, the apparatus detects the arc by sensing data of color and chroma and brightness of the arc.