The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2012

Filed:

Apr. 23, 2010
Applicants:

Alexander Burinskiy, San Jose, CA (US);

James Steven Brown, Alviso, CA (US);

Inventors:

Alexander Burinskiy, San Jose, CA (US);

James Steven Brown, Alviso, CA (US);

Assignee:

National Semiconductor Corporation, Santa Clara, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for providing feed forward compensation in a drive signal for a rapid resonant frequency change due to a rapid LASER intensity change upon a micro-electro-mechanical system (MEMS) mirror and/or a surrounding MEMS structure in a MEMS scanner causing a mirror temperature change is provided. The method includes determining an intensity factor for at least one laser beam projected onto the MEMS scanner and adjusting a drive frequency of the drive signal based on the intensity factor. The intensity could represent a single intensity factor for multiple laser beams projected onto the MEMS scanner. The method could also include delaying the adjustment of the drive frequency to allow the resonant frequency change to take affect in the MEMS scanner. Delaying the adjustment could include delaying delivery of the intensity factor such that the intensity factor is provided coincident with the resonant frequency change of the MEMS scanner.


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