The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2012

Filed:

Nov. 23, 2009
Applicants:

Daniel J. Miller, San Francisco, CA (US);

Martha Johnson, Fort Collins, CO (US);

Inventors:

Daniel J. Miller, San Francisco, CA (US);

Martha Johnson, Fort Collins, CO (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/15 (2006.01); H03H 9/54 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

An acoustic resonator, comprises a substrate and a first passivation layer disposed over the substrate. The first passivation layer comprises a first layer of silicon carbide (SiC). The acoustic resonator further comprises a first electrode disposed over the passivation layer, a second electrode, and a piezoelectric layer disposed between the first and second electrodes. The acoustic resonator comprises a second passivation layer disposed over the second electrode. The second passivation layer comprises a second layer of silicon carbide (SiC).


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