The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2012
Filed:
Jul. 08, 2009
BO Gu, Andover, MA (US);
Jonathan S. Ehrmann, Sudbury, MA (US);
Joseph V. Lento, Methuen, MA (US);
Bruce L. Couch, North Attleboro, MA (US);
Yun Fee Chu, Natick, MA (US);
Shepard D. Johnson, Andover, MA (US);
Bo Gu, Andover, MA (US);
Jonathan S. Ehrmann, Sudbury, MA (US);
Joseph V. Lento, Methuen, MA (US);
Bruce L. Couch, North Attleboro, MA (US);
Yun Fee Chu, Natick, MA (US);
Shepard D. Johnson, Andover, MA (US);
GSI Group Corporation, Bedford, MA (US);
Abstract
A method, system and scan lens for use therein are provided for high-speed, laser-based, precise laser trimming at least one electrical element along a trim path. The method includes generating a pulsed laser output with a laser, the output having one or more laser pulses at a repetition rate. A fast rise/fall time, pulse-shaped q-switched laser or an ultra-fast laser may be used. Beam shaping optics may be used to generate a flat-top beam profile. Each laser pulse has a pulse energy, a laser wavelength within a range of laser wavelengths, and a pulse duration. The wavelength is short enough to produce desired short-wavelength benefits of small spot size, tight tolerance, high absorption and reduced or eliminated heat-affected zone (HAZ) along the trim path, but not so short so as to cause microcracking. In this way, resistance drift after the trimming process is reduced.