The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2012
Filed:
Oct. 14, 2010
David S. Ginley, Evergreen, CO (US);
John Perkins, Boulder, CO (US);
Joseph Berry, Boulder, CO (US);
Thomas Gennett, Denver, CO (US);
David S. Ginley, Evergreen, CO (US);
John Perkins, Boulder, CO (US);
Joseph Berry, Boulder, CO (US);
Thomas Gennett, Denver, CO (US);
Alliance for Sustainable Energy, LLC, Golden, CO (US);
Abstract
Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface.