The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2012
Filed:
Jul. 21, 2009
Applicants:
Ichiki Takemoto, Kawanishi, JP;
Tatsuro Masuyama, Toyonaka, JP;
Takashi Hiraoka, Hannan, JP;
Inventors:
Assignee:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07D 207/00 (2006.01); C07D 209/00 (2006.01); C07D 221/14 (2006.01); C07D 295/00 (2006.01); C08F 226/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
An imide compound represented by the formula (I): wherein Rrepresents a C1-C20 aliphatic hydrocarbon group etc., Wrepresents —CO—O— etc., Qand Qeach independently represent a fluorine atom etc., and A represents a group represented by the formula (I-1): wherein Arepresents —CH—CH— etc., and a chemically amplified resist composition containing the same.