The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2012
Filed:
Aug. 19, 2009
Michael L. Bufano, Belmont, MA (US);
Ulysses Gilchrist, Reading, MA (US);
William Fosnight, Carlisle, MA (US);
Christopher Hofmeister, Hampstead, NH (US);
Daniel Babbs, Austin, TX (US);
Robert C. May, Austin, TX (US);
Michael L. Bufano, Belmont, MA (US);
Ulysses Gilchrist, Reading, MA (US);
William Fosnight, Carlisle, MA (US);
Christopher Hofmeister, Hampstead, NH (US);
Daniel Babbs, Austin, TX (US);
Robert C. May, Austin, TX (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.