The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2012
Filed:
Aug. 10, 2009
Bruno Michel, Yorktown Heights, NY (US);
Thomas J. Brunschwiler, Yorktown Heights, NY (US);
Hugo E. Rothuizen, Yorktown Heights, NY (US);
Urs Kloter, Yorktown Heights, NY (US);
Bruno Michel, Yorktown Heights, NY (US);
Thomas J. Brunschwiler, Yorktown Heights, NY (US);
Hugo E. Rothuizen, Yorktown Heights, NY (US);
Urs Kloter, Yorktown Heights, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method for producing a plate with a first face with protrusions confined by first and second grooves includes steps of: etching recessed zones into a plate; depositing a photoresist layer on the plate; forming a passivation layer over the photoresist layer; removing the passivation layer at the bottom of the recessed zones; electroplating metal in the recessed zones; removing the passivation layer; removing the photoresist layer; and removing the semiconductor material to expose the first and second grooves.