The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Nov. 13, 2009
Hyun-chul Park, Pohang-si, KR;
Hye-jin Kim, Incheon, KR;
Woon-bong Hwang, Pohang-si, KR;
Young-deuk Kim, Pohang-si, KR;
Kun-hong Lee, Pohang-si, KR;
Hyun-Chul Park, Pohang-si, KR;
Hye-Jin Kim, Incheon, KR;
Woon-Bong Hwang, Pohang-si, KR;
Young-Deuk Kim, Pohang-si, KR;
Kun-Hong Lee, Pohang-si, KR;
Postech Academy-Industry Foundation, Pohang, KR;
Abstract
Disclosed are a humidity sensor and a fabricating method thereof. The humidity sensor includes a substrate, an anodic aluminum oxide layer formed on the substrate and having a plurality of holes, and electrodes formed on the anodic aluminum oxide layer, in order to improve sensitivity and accuracy of the humidity sensor. Further, the fabricating method of a humidity sensor includes preparing an aluminum substrate, forming an anodic aluminum oxide layer by oxidizing the aluminum substrate, and forming electrodes on the anodic aluminum oxide layer.