The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Sep. 28, 2009
Sang-young Park, Yongin, KR;
Ju-eel Mun, Yongin, KR;
You-min Cha, Yongin, KR;
Won-woong Jung, Yongin, KR;
Sang-Young Park, Yongin, KR;
Ju-Eel Mun, Yongin, KR;
You-Min Cha, Yongin, KR;
Won-Woong Jung, Yongin, KR;
Samsung Display Co., Ltd., Gibeung-Gu, Yongin, Gyeonggi-Do, KR;
Abstract
The present invention discloses an electrostatic chuck sucking and supporting a substrate with an electrostatic force and an OLED manufacturing apparatus having the same. The electrostatic chuck includes an insulating plate having at least one opening penetrating a center thereof, a pair of electrodes mounted on the insulating plate, a first controller applying a voltage to the pair of electrodes, and an electrostatic charge removing unit disposed near the insulating plate and emitting ions into the at least one opening to remove electrostatic charges distributed around a side of the insulating plate.