The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Apr. 19, 2012
Yu-jen Wang, Taipei County, TW;
Chien-shien Yeh, Tainan County, TW;
Chung-de Chen, Miaoli County, TW;
Hung-chung LI, Hualien County, TW;
Yu-Jen Wang, Taipei County, TW;
Chien-Shien Yeh, Tainan County, TW;
Chung-De Chen, Miaoli County, TW;
Hung-Chung Li, Hualien County, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
The present invention provides a vibration-actuated micro mirror device comprising a substrate having a swinging frame and a reflection mirror, and a vibration part having a first and a second vibration structures coupled to the substrate, wherein the first vibration structure is driven to generate a first complex wave formed by a first and a second wave signals while the second vibration structure is driven to generate a second complex wave formed by a third and a fourth wave signals, and the first and the third wave signals are formed with the same frequency and phase while the second and the fourth wave signals are formed with the same frequency but opposite phases. The first and the second complex waves actuate the substrate such that the swinging frame is rotated about a first axis while the reflection mirror is rotated about a second axis.