The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 04, 2012

Filed:

Apr. 21, 2009
Applicants:

Katsuhito Ito, Fuchu, JP;

Ryohei Yanagishima, Oume, JP;

Inventors:

Katsuhito Ito, Fuchu, JP;

Ryohei Yanagishima, Oume, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A monitor part performs monitoring by detecting contamination on a lower surface of an article to be inspected based on a lower surface detection signal, detecting contamination on an upper surface of the article based on an upper surface detection signal, detecting contamination on a front surface of the article based on a front, lower surface detection signal and a front, upper surface detection signal, detecting contamination on a rear surface of the article based on a rear, lower surface detection signal and a rear, upper surface detection signal, detecting contamination on a left surface of the article based on a left, lower surface detection signal and a left, upper surface detection signal, and detecting contamination on a right surface of the article based on a right, lower surface detection signal and a right, upper surface detection signal.


Find Patent Forward Citations

Loading…