The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Feb. 26, 2010
Young-seok Kim, Hwaseong-si, KR;
Jong-sun Peak, Seongnam-si, KR;
Young-nam Kim, Yongin-si, KR;
Hyung-suk Cho, Hwaseong-si, KR;
Sun-jin Kang, Suwon-si, KR;
Bu-dl Yoo, Seoul, KR;
Young-Seok Kim, Hwaseong-si, KR;
Jong-Sun Peak, Seongnam-si, KR;
Young-Nam Kim, Yongin-si, KR;
Hyung-Suk Cho, Hwaseong-si, KR;
Sun-Jin Kang, Suwon-si, KR;
Bu-Dl Yoo, Seoul, KR;
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Abstract
An apparatus for measuring a semiconductor device is provided. The apparatus includes a beam emitter configured to irradiate an electron beam onto a sample having the entire region composed of a critical dimension (CD) region, which is formed by etching or development, and a normal region connected to the CD region, and an analyzer electrically connected to the beam emitter, and configured to select and set a wavelength range of a region in which a difference in reflectance between the CD region and the normal region occurs, after obtaining reflectance from the electron beam reflected by a surface of the sample according to the wavelength of the electron beam. A method of measuring a semiconductor device using the measuring apparatus is also provided. Therefore, it is possible to minimize a change in reflectance due to the thickness and properties of the semiconductor device, and set a wavelength range to monitor a specific wavelength, thereby accurately measuring and analyzing a CD value of a measurement part of the semiconductor device.