The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 04, 2012

Filed:

Jul. 08, 2010
Applicants:

Mehmet Emin Aklik, Windham, ME (US);

Thomas James Moutinho, Gorham, ME (US);

Inventors:

Mehmet Emin Aklik, Windham, ME (US);

Thomas James Moutinho, Gorham, ME (US);

Assignee:

National Semiconductor Corporation, Santa Clara, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract

A via is formed on a wafer to lie within an opening in a non-conductive structure and make an electrical connection with an underlying conductive structure so that the entire top surface of the via is substantially planar, and lies substantially in the same plane as the top surface of the non-conductive structure. The substantially planar top surface of the via enables a carbon nanotube switch to be predictably and reliably closed.


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