The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Sep. 08, 2010
Jing Chen, Shanghai, CN;
Jiexin Luo, Shanghai, CN;
Qingqing Wu, Shanghai, CN;
Xiaolu Huang, Shanghai, CN;
Xi Wang, Shanghai, CN;
Jing Chen, Shanghai, CN;
Jiexin Luo, Shanghai, CN;
Qingqing Wu, Shanghai, CN;
Xiaolu Huang, Shanghai, CN;
Xi Wang, Shanghai, CN;
Abstract
The present invention discloses a manufacturing method of SOI MOS device eliminating floating body effects. The active area of the SOI MOS structure according to the present invention includes a body region, a N-type source region, a N-type drain region, a heavily doped P-type region, wherein the N-type source region comprises a silicide and a buried insulation region and the heavily doped P-type region is located between the silicide and the buried insulation region. The heavily doped P-type region contacts to the silicide, the body region, the buried insulation layer and the shallow trench isolation (STI) structure respectively. The manufacturing method of the device comprises steps of forming a heavily doped P-type region via ion implantation method, forming a metal layer on a part of the surface of the source region, then obtaining a silicide by the heat treatment of the metal layer and the Si material below. The present invention utilizes the silicide and the heavily doped P-type region to form an ohmic contact in order to release the holes accumulated in the body region of SOI MOS device and eliminate SOI MOS floating body effects. Besides, the manufacturing process is simple and can be easily implement. Further, the manufacturing process according to the present invention will not increase chip area and is compatible with conventional CMOS process.