The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Oct. 28, 2009
Steven J. Adler, Saratoga, CA (US);
Peter Johnson, Sunnyvale, CA (US);
Ira Wygant, Palo Alto, CA (US);
Steven J. Adler, Saratoga, CA (US);
Peter Johnson, Sunnyvale, CA (US);
Ira Wygant, Palo Alto, CA (US);
National Semiconductor Corporation, Santa Clara, CA (US);
Abstract
A method includes forming first isolation trenches in a first side of a first semiconductor-on-insulator (SOI) structure to electrically isolate multiple portions of the first SOI structure from each other. The method also includes bonding a second SOI structure to the first SOI structure to form multiple cavities between the SOI structures. The method further includes forming conductive plugs through a second side of the first SOI structure and forming second isolation trenches in the second side of the first SOI structure around the conductive plugs. In addition, the method includes removing portions of the second SOI structure to leave a membrane bonded to the first SOI structure. The isolated portions of the first SOI structure, the cavities, and the membrane form multiple capacitive micromachined ultrasonic transducer (CMUT) elements. Each CMUT element is formed in one of the isolated portions of the first SOI structure and includes multiple CMUT cells.