The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
May. 16, 2011
Applicants:
Masaki Ohashi, Joetsu, JP;
Takeshi Kinsho, Joetsu, JP;
Kazumi Noda, Joetsu, JP;
Seiichiro Tachibana, Joetsu, JP;
Inventors:
Masaki Ohashi, Joetsu, JP;
Takeshi Kinsho, Joetsu, JP;
Kazumi Noda, Joetsu, JP;
Seiichiro Tachibana, Joetsu, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F21V 9/04 (2006.01); F21V 9/06 (2006.01); G02B 5/22 (2006.01); G02B 5/26 (2006.01); G03C 1/00 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A near-infrared absorbing dye has an anion of formula (1) wherein Ais H or CF, Ris OH or —OC(═O)—R', and R′ is a monovalent hydrocarbon group. The dye has excellent solvent solubility as well as good optical properties and heat resistance, offering the advantages of easy coating and effective working during film formation. The dye free of heavy metal in its structure is advantageously used in the process of fabricating semiconductor devices.