The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Apr. 13, 2009
Jeffrey C. Hudgens, San Francisco, CA (US);
Jagan Rangarajan, San Jose, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Penchala N. Kankanala, Santa Clara, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Jagan Rangarajan, San Jose, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Penchala N. Kankanala, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present invention generally provide an apparatus and method for transferring substrates in a processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint when compared to conventional techniques.