The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 04, 2012

Filed:

Jun. 03, 2010
Applicant:

Alessandro Rocchi, Solvay, IT;

Inventor:

Alessandro Rocchi, Solvay, IT;

Assignee:

Maxim Integrated Products, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2006.01);
U.S. Cl.
CPC ...
Abstract

A MEMS sensor is provided with a substrate and a sensor element. The sensor element moves in response to an influence registered by the sensor primarily in an oscillating turn around a sensor axis that is parallel to the substrate. The sensor has an anchor arranged on the substrate in order to hold the sensor element onto the substrate. A connecting element arranges the sensor element on the anchor.


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