The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2012
Filed:
Nov. 30, 2006
Bryan C. Bolt, Beaverton, OR (US);
David M. Hemenway, Beaverton, OR (US);
Mark Kosmowski, Beaverton, OR (US);
A. Grey Lerner, Portland, OR (US);
Brady E. Nilsen, Beaverton, OR (US);
Richard Pope, Beaverton, OR (US);
Bryan C. Bolt, Beaverton, OR (US);
David M. Hemenway, Beaverton, OR (US);
Mark Kosmowski, Beaverton, OR (US);
A. Grey Lerner, Portland, OR (US);
Brady E. Nilsen, Beaverton, OR (US);
Richard Pope, Beaverton, OR (US);
Electro Scientific Industries, Inc., Portland, OR (US);
Abstract
Preferred embodiments of a purge gas port, laser beam attenuating input window, and laser shutter constitute subsystems of a UV laser optical system in which a laser beam is completely enclosed to reduce contamination of the optical system components. Purge gas is injected through multiple locations in a beam tube assembly to ensure that the optical component surfaces sensitive to contamination are in the flow path of the purge gas. The input window functions as a fixed level attenuator to limit photopolymerization of airborne molecules and particles. Periodically rotating optical elements asymmetrically in their holders reduces burn damage to the optics.