Method for manufacturing a plurality of thin chips and correspondingly manufactured thin chip

Abstract

In a method is for producing through contacts in thin chips, whose functionality is implemented in a layer structure starting from the surface layer of a semiconductor substrate, to separate these chips, the surface layer is structured using the layer structure and at least one cavity is produced below the surface layer, so that the individual chips are defined by trenches opening into the cavity and the individual chips are connected via support elements in the area of the cavity to the substrate below the cavity. The chips are provided with through contacts, in that firstly a contact hole, which extends through the entire layer structure of the chip and opens into a support element, is produced for each through contact. At least one dielectric layer is applied to the thus structured layer structure and in particular to the wall of the contact holes and structured in accordance with the electrical connections to be created between areas of the chip surface and at least one through contact. A metal plating, which extends in particular to the wall of the contact holes and the surface areas of the layer structure which adjoin the contact holes, is applied thereon and structured. Finally, the contact holes which are thus metal-plated are also filled using a solder.