The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 20, 2012

Filed:

Jun. 03, 2009
Applicant:

Lakshman Withanawasam, Maple Grove, MN (US);

Inventor:

Lakshman Withanawasam, Maple Grove, MN (US);

Assignee:

Honeywell International Inc., Morristown, NJ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/00 (2006.01); G01C 9/00 (2006.01); G01C 21/10 (2006.01);
U.S. Cl.
CPC ...
Abstract

An integrated sensor device is provided. The integrated sensor device comprises a first substrate including a surface portion and a second substrate coupled to the surface portion of the first substrate in a stacked configuration, wherein a cavity is defined between the first substrate and the second substrate. The integrated sensor device also comprises one or more micro-electro-mechanical systems (MEMS) sensors located at least partially in the first substrate, wherein the MEMS sensor communicates with the cavity. The integrated sensor device further comprises one or more additional sensors.


Find Patent Forward Citations

Withanawasam, Lakshman. (2012). Integrated micro-electro-mechanical systems (mems) sensor device (U.S. Patent No. 8315793). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8315793

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…