The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2012
Filed:
Jul. 30, 2010
Applicants:
Akinori Ohkubo, Tucson, AZ (US);
Yasuyuki Unno, Tucson, AZ (US);
Inventors:
Akinori Ohkubo, Tucson, AZ (US);
Yasuyuki Unno, Tucson, AZ (US);
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for measuring a surface profile of an object, the method includes, acquiring information about a first direction where a step of a surface of the object extends relative to a scanning direction, setting phase distribution applied to the irradiation beam according to the information, and scanning the object in the scanning direction with the irradiation beam.