The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2012
Filed:
Jun. 30, 2009
Applicants:
Jim D Cornell, Rochester, NY (US);
Joseph D Malach, Newark, NY (US);
Paul Francis Michaloski, Rochester, NY (US);
James Edson Webb, Fairport, NY (US);
Inventors:
Jim D Cornell, Rochester, NY (US);
Joseph D Malach, Newark, NY (US);
Paul Francis Michaloski, Rochester, NY (US);
James Edson Webb, Fairport, NY (US);
Assignee:
Corning Incorporated, Corning, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/68 (2006.01); G03B 27/52 (2006.01);
U.S. Cl.
CPC ...
Abstract
A telecentricity corrector is incorporated into a microlithographic projection system to achieve telecentricity targets at the output of the microlithographic projection system. The telecentricity corrector is located between an illuminator and a projection lens of the projection system, preferably just in advance of a reticle for controlling angular distributions of light illuminating the reticle.