The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2012
Filed:
Sep. 10, 2010
Tomoaki Yamada, Tokyo, JP;
Tomoaki Yamada, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
The present invention relates to a shape measuring device that can improve measurement accuracy. A liquid crystal elementprojects striped projection patterns whose intensities are changed according to the position in three sinusoidal states with initial phases of 0, 120, and 240 degrees onto an objectto be measured, each of a CCD sensorand a CCD sensorpicks up an image obtained by forming reflection light from the objectto be measured by the projected projection pattern, and a controllerevaluates reliability of a measurement result at a position where a position conjugated with an image pickup surface of image pickup means is different along an optical path direction on the basis of each received light amount of each pixel of a plurality of images picked up when at least two projection patterns are projected. As a result, measurement accuracy can be improved. The present invention can be applied to a shape measuring device that measures the shape of an object to be measured.