The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 20, 2012

Filed:

Sep. 14, 2009
Applicants:

Kinya Ohtani, Kanagawa, JP;

Kenya Kobayashi, Kanagawa, JP;

Inventors:

Kinya Ohtani, Kanagawa, JP;

Kenya Kobayashi, Kanagawa, JP;

Assignee:

Renesas Electronics Corporation, Kawasaki-shi, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor apparatus according to the present invention includes a first semiconductor layer of a first conductive type, a low concentration base region of a second conductive type formed on the first semiconductor layer, a gate electrode formed in a trench with insulating film on an inner surface of the trench that is formed to reach the first semiconductor layer from a surface of the low concentration base region, a source region of the first conductive type formed, contacting the insulating film, on a surface of the low concentration base region, a first high concentration base region, a second high concentration base region provided below and separated from the first concentration base region, and a third high concentration base region of the second conductive type included inside the low concentration base region, provided below and separated from the second high concentration base region.


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