The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2012
Filed:
Feb. 15, 2011
Joachim Zach, Oestringen, DE;
Joachim Zach, Oestringen, DE;
CEOS Corrected Electron Optical Systems GmbH, Heidelberg, DE;
Abstract
The invention concerns a corrector () for chromatic and aperture aberration correction in an electron microscope with six multipoles () which are disposed in the optical path () one after the other symmetrically with respect to a symmetry plane () for generating quadrupole fields (') and octupole fields, wherein the quadrupole fields (′) of all six multipoles () are consecutively rotated through 90° with respect to one another, thereby generating a mirror-symmetrical exchange symmetry of the axial fundamental rays (xα, yβ). In accordance with the invention, the following is provided for correcting azimuthal coma: