The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 20, 2012

Filed:

Jun. 02, 2005
Applicants:

Richard Francis, Manhattan Beach, CA (US);

Chiu NG, El Segundo, CA (US);

Inventors:

Richard Francis, Manhattan Beach, CA (US);

Chiu Ng, El Segundo, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/331 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor device is formed in a thin float zone wafer. Junctions are diffused into the top surface of the wafer and the wafer is then reduced in thickness by removal of material from its bottom surface. A weak collector is then formed in the bottom surface by diffusion of boron (for a P type collector). The weak collector is then formed or activated only over spaced or intermittent areas. This is done by implant of the collector impurity through a screening mask; or by activating only intermittent areas by a laser beam anneal in which the beam is directed to anneal only preselected areas. The resulting device has an effective very low implant dose, producing a reduced switching energy and increased switching speed, as compared to prior art weak collector/anodes and life time killing technologies.


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