The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2012
Filed:
May. 12, 2008
Applicant:
Teruya Fukaura, Fukuoka, JP;
Inventor:
Teruya Fukaura, Fukuoka, JP;
Assignee:
Mitsubishi Electric Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
Abstract
A capacitive acceleration sensor that prevents sticking of a mass body, made of silicon, to a first sealing substrate or a second sealing substrate, made of glass. The capacitive acceleration sensor includes a first sealing substrate and a second sealing substrate each made of glass. The mass body is suspended between the first and second sealing substrates by a beam attached to a substrate, and one or both of the sealing substrates is processed such that the mass body only contacts with a subsection of the substrate surface.