The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2012
Filed:
Jan. 28, 2008
Ivo W. Rangelow, Baunatal, DE;
Stefan Klett, Waltershausen, DE;
Eishad Guliyev, Ilmenau, DE;
Tzvetan Ivanov, Ilmenau, DE;
Burkhard Volland, Erfurt, DE;
Ivo W. Rangelow, Baunatal, DE;
Stefan Klett, Waltershausen, DE;
Eishad Guliyev, Ilmenau, DE;
Tzvetan Ivanov, Ilmenau, DE;
Burkhard Volland, Erfurt, DE;
Technische Universitaet Ilmenau, Ilmenau, DE;
Abstract
The invention relates to a device and a method for the micromechanical positioning and handling of an object. The aim of the invention is to provide a device and an associated method for the micromechanical positioning and handling of objects by means of which the scanning speed can be increased and the positional accuracy be improved so that real time images or video rate images (ca. 25 images per second) having a lateral and vertical resolution in the nanometer range can be achieved. According to the invention, a monolithic component, preferably made of silicon, comprises a support element, an object carrier, a plurality of guide elements and elements for transmitting the movement, the preferably piezoresistive drive elements and the preferably piezoresistive position detectors being integrated into said monolithic component; Said micromechanical positioning device can be used, for example, in scanning probe microscopy and in nanopositioning and nanomanipulation technology.