The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2012
Filed:
Sep. 10, 2008
Kunihiro Ueda, Hong Kong, CN;
Hong Xin Fang, Hong Kong, CN;
Dong Wang, Hong Kong, CN;
Yoshiyuki Konishi, Kyoto, JP;
Satoko Ueno, Kyoto, JP;
Shigenobu Okada, Kyoto, JP;
Kunihiro Ueda, Hong Kong, CN;
Hong Xin Fang, Hong Kong, CN;
Dong Wang, Hong Kong, CN;
Yoshiyuki Konishi, Kyoto, JP;
Satoko Ueno, Kyoto, JP;
Shigenobu Okada, Kyoto, JP;
SAE Magnetics (H.K.) Ltd., Hong Kong, CN;
Simadzu Corporation, Kyoto, JP;
Abstract
To provide a high-quality protection target by forming a protective film that is thin and excellent in corrosion resistance. Provided is a protective film forming method for forming a protective film at least on a surface of a protection target. The method comprises: a base film forming step for forming a base film on the surface of the protection target; and a DLC film forming step for forming a diamond-like carbon film on the base film. The base film forming step forms the base film on the surface of the protection target for a plurality of times by repeating a process of depositing the base film in a prescribed thickness and eliminating a part of or a whole part of the base film. Further, the method comprises, before the DLC film forming step, an insulating layer forming step for forming an insulating layer on the surface of the base film on which the diamond-like carbon film is to be formed.