The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2012
Filed:
May. 16, 2008
Applicants:
Tao Hou, Palo Alto, CA (US);
Son T. Nguyen, San Jose, CA (US);
Kenric Choi, San Jose, CA (US);
Anh N. Nguyen, Milpitas, CA (US);
Inventors:
Tao Hou, Palo Alto, CA (US);
Son T. Nguyen, San Jose, CA (US);
Kenric Choi, San Jose, CA (US);
Anh N. Nguyen, Milpitas, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and apparatus for heating or cooling a fluid. An inlet conduit coupled to a plurality of distribution nozzles in fluid communication with a channel at the periphery of the apparatus. An insert and a sleeve cooperatively define a thin gap, in fluid communication with the channel, through which the fluid flows. Thermal inserts near the thin gap generate heat flux into or out of the fluid, which exits through an outlet conduit.