The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2012
Filed:
Dec. 19, 2006
David F. Lemmerhirt, Ann Arbor, MI (US);
Collin A. Rich, Ypsilanti, MI (US);
David F. Lemmerhirt, Ann Arbor, MI (US);
Collin A. Rich, Ypsilanti, MI (US);
Sonetics Ultrasound, Inc., Ann Arbor, MI (US);
Abstract
The first integrated circuit/transducer deviceof the handheld probe includes CMOS circuitsand cMUT elements. The cMUT elementsfunction to generate an ultrasonic beam, detect an ultrasonic echo, and output electrical signals, while the CMOS circuitsfunction to perform analog or digital operations on the electrical signals generated through operation of the cMUT elements. The manufacturing method for the first integrated circuit/transducer deviceof the preferred embodiment includes the steps of depositing the lower electrode S; depositing a sacrificial layer S; depositing a dielectric layer S; depositing the upper electrode S; depositing a protective layer on the upper electrode S; and removing the sacrificial layer S. In the preferred embodiment, the manufacturing method also includes the step of depositing a sealant layer to seal a cavity between the lower electrode and the upper electrode S