The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2012
Filed:
Jul. 20, 2010
Gee Sung Chae, Incheon-Kwangyokshi, KR;
Gyoo Chul JO, Kyonggi-do, KR;
Yong Sup Hwang, Kyonggi-do, KR;
Gee Sung Chae, Incheon-Kwangyokshi, KR;
Gyoo Chul Jo, Kyonggi-do, KR;
Yong Sup Hwang, Kyonggi-do, KR;
LG Display Co., Ltd., Seoul, KR;
Abstract
The present invention discloses an etchant for etching at least two different metal layers, the etchant comprising hydrogen peroxide (HO) and one of carboxylic acid, carboxylate salt, and acetyl group (CHCO—). The present invention also discloses a method of fabricating a metal wiring on a substrate, the method comprising forming a first metal layer on a substrate, forming a second metal layer on the first metal layer, and simultaneously etching the first metal layer and the second metal layer with an etchant comprising hydrogen peroxide (HO) and one of carboxylic acid, carboxylate salt, and acetyl group (CHCO—).