The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8308921 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 13, 2012

Filed:

Dec. 21, 2006
Applicants:

Hugh C. Hiner, Fremont, CA (US);

Lijie Zhao, Pleasanton, CA (US);

Hariharakeshava Hegde, Pleasanton, CA (US);

Inventors:

Hugh C. Hiner, Fremont, CA (US);

Lijie Zhao, Pleasanton, CA (US);

Hariharakeshava Hegde, Pleasanton, CA (US);

Assignee:

Western Digital (Fremont), LLC, Fremont, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A shaper mask for particle flux includes a central portion extending from a body of the shaper mask along a first axis to block at least a first portion of a particle flux through the shaper mask from a first direction. The mask also includes at least one off-axis portion. Each off-axis portions extends from the body of the shaper mask along a respective second axis different from the first axis. Each off-axis portion is shaped to block a respective second portion of the particle flux traveling through the shaper mask from a second direction different from the first direction.


Find Patent Forward Citations

Hiner, Hugh. (2012). Mask for increased uniformity in ion beam deposition (U.S. Patent No. 8308921). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8308921

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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