The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8308894 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 13, 2012

Filed:

Jul. 15, 2009
Applicants:

Dae-seung Mun, Yongin, KR;

Joo-heon Kim, Yongin, KR;

Inventors:

Dae-Seung Mun, Yongin, KR;

Joo-Heon Kim, Yongin, KR;

Assignee:

Samsung Display Co., Ltd., Giheung-Gu, Yongin, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract

A substrate etching apparatus includes a supporting unit for supporting substrate in a vertical position and an etching solution supply unit disposed above the substrate to supply an etching solution to the top of the substrate such that the etching solution runs down both of faces of the substrate from the top of the substrate.


Find Patent Forward Citations

Mun, Dae-Seung. (2012). Substrate etching apparatus (U.S. Patent No. 8308894). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8308894

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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